In this study, thermally assisted reactive ion etching (TRIE) was evaluated by both experiments and simulations. TRIE employs a self-heated stage instead of the etching stage of a regular RIE ap ... Read More

We fabricated and characterized three kinds of nanocrystalline (NC) Ni–B electrodeposits with low boron content (i.e., 0.05, 0.12, and 0.19 wt.%) for micro-electromechanical system (MEMS) appli ... Read More

We propose a pixel aperture technique in a complementary metal oxide semiconductor (CMOS) image sensor for 3D imaging. In conventional camera systems, the aperture is located between the object ... Read More

To measure CO2 gas concentration, a nondispersive infrared (NDIR) gas sensor is fabricated by implementing a thermopile detector that includes an application-specific integrated circuit (ASIC) ch ... Read More

We report an enzyme-based potentiometric glutamate sensor combined with a semiconductor device for neurotransmitter imaging, the response of which is based on the detection of the interfacial pot ... Read More

Low-intensity pulsed ultrasound (LIPUS) stimulation can be used for noninvasive neuromuscular rehabilitation. For increasing stimulation efficiency, focused ultrasound (FUS) providing high-energ ... Read More

A Si microoptical bench has been developed for measuring the absorption spectrum of cells in suspension. Optical fibers are the elements for constructing a light path inside a Si chip. The sens ... Read More

Our ultimate goal is to design, fabricate, and test a new platform for malaria diagnosis using an array of magnets located parallel to a straight microchannel. The principle of the diagnosis is ... Read More

We present an impedance monitoring microchamber array for discriminating normal and cancer cells, the top layer of which is covered to form a stable contact between the cells and the electrodes i ... Read More

In this work, a large-area tactile sensing array with high sensitivity is reported. The sensing elements of the array consist of multiwall carbon nanotubes dispersed in polydimethylsiloxane poly ... Read More

In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sen ... Read More

We present a systematic review of solid tunable lenses based on the Alvarez–Lohmann principle, which mainly focuses on the optimization, miniaturization, and integration of such solid tunable l ... Read More