Vol. 31 No. 8(2)
Special Issue on Advanced Nanofabrication Processes for Emerging Devices and Materials
Guest Editor: Hiroyuki Akinaga (National Institute of Advanced Industrial Science and Technology, AIST)
Advanced nanofabrication technologies have fostered a manufacturing revolution in various industrial fields. Technological capabilities previously were owned only by researchers and large compan ... Read More
In this paper, we report on the impact of sample preparation methods on the adhesion reproducibility of thin films, considering future applications of supercritical fluid deposition (SCFD) to MEM ... Read More
The sol–gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, a ... Read More
We have quantitatively investigated a periodic nanostructure exposure process by electron beam lithography (EBL). The targeted applications are nano- to micro-electromechanical systems (NEMS/MEM ... Read More
In this study, we propose a solidified ionic liquid with a 3D microstructure to increase its surface area for the performance enhancement of a vibration energy harvester (VEH). By soft lithograp ... Read More
Nanoscale sensing applications require significant usage of power which can be achieved through efficient management of omnipresent heat. The spin Seebeck effect (SSE) is rather fresh energy har ... Read More
The Support Laboratory of Nanofabrication of Yamaguchi University is a member of the Nanofabrication Platform Consortium in the Nanotechnology Platform Japan. Our laboratory features the desorpti ... Read More
An IoT force sensor module was fabricated and demonstrated in a five-day practical program for students, as part of the Nanotechnology Platform Japan project. The module mainly consists of a sili ... Read More
S&M1949Letter of Special Issue |
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S&M1949 Nanofabrication Technologies for All Hiroyuki Akinaga pp. 2477-2480 https://doi.org/10.18494/SAM.2019.2521 Published on August 19, 2019 PDF (open access) |
S&M1950Research Paper of Special Issue |
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S&M1950 Influence of Pretreatment on Adhesion Quality of Supercritical-fluid-deposited Cu Film on Si Naoto Usami, Etsuko Ota, Takeshi Momose, Akio Higo, and Yoshio Mita pp. 2481-2496 https://doi.org/10.18494/SAM.2019.2316 Published on August 19, 2019 PDF (open access) |
S&M1951Research Paper of Special Issue |
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S&M1951 Sol–Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols Masaaki Moriyama, Kentaro Totsu, and Shuji Tanaka pp. 2497-2509 https://doi.org/10.18494/SAM.2019.2420 Published on August 19, 2019 PDF (open access) |
S&M1952Research Paper of Special Issue |
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S&M1952 Experimental Comparison of Rapid Large-area Direct Electron Beam Exposure Methods with Plasmonic Devices Akio Higo, Tomoki Sawamura, Makoto Fujiwara, Eric Lebrasseur, Ayako Mizushima, Etsuko Ota, and Yoshio Mita pp. 2511-2525 https://doi.org/10.18494/SAM.2019.2443 Published on August 19, 2019 PDF (open access) |
S&M1953Research Paper of Special Issue |
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S&M1953 Fabrication of Solidified Ionic Liquid with 3D Microstructures and Its Application to Vibration Energy Harvester Taiki Iida, Takuya Tsukamoto, Kazumoto Miwa, Shimpei Ono, and Takaaki Suzuki pp. 2527-2539 https://doi.org/10.18494/SAM.2019.2309 Published on August 19, 2019 PDF (open access) |
S&M1954Research Paper of Special Issue |
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S&M1954 Spin Seebeck Effect in Neodymium Iron Garnet Multilayers Shashank Tyagi, Taito Maeda, Keisuke Kimura, Surbhi Gupta, Kengo Kishimoto, Tsuyoshi Koyanagi, Hironori Asada, and Yasuhiro Fukuma pp. 2541-2546 https://doi.org/10.18494/SAM.2019.2335 Published on August 19, 2019 PDF (open access) |
S&M1955Research Paper of Special Issue |
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S&M1955 Development of Operand Desorption Gas Analysis System Hiroki Kurisu, Takayuki Kimura, Setsuo Yamamoto, and Tetsuo Higuchi pp. 2547-2554 https://doi.org/10.18494/SAM.2019.2338 Published on August 19, 2019 PDF (open access) |
S&M1956Research Paper of Special Issue |
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S&M1956 Fabrication of IoT Force Sensor Module in Five-day Program for Students as Part of Nanotechnology Platform Japan Project Kentaro Totsu, Masaaki Moriyama, Hiraku Watanabe, Toshiyuki Kikuta, Masahiro Hemmi, Masaaki Shoji, Takashi Yoshida, and Masataka Tatsuta pp. 2555-2563 https://doi.org/10.18494/SAM.2019.2390 Published on August 19, 2019 PDF (open access) |
Cover of this Issue |
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