Vol. 35 No. 6(2)
Special Issue on Advanced Microfabrication Processes for MEMS/NEMS
Guest Editor: Hiroshi Toshiyoshi (The University of Tokyo)
Two-dimensional (2D) materials are highly compatible with microelectromechanical systems (MEMSs), and the latter can be used to mechanically manipulate 2D materials with micrometer-level precisio ... Read More
In this paper, we present a new structure and a process for electrostatic energy harvesters made in a silicon-on-glass wafer. Conventional electret-based MEMS energy harvesters are produced using ... Read More
We demonstrate a microelectromechanical systems (MEMS) electret-type vibrational energy harvester with a wide bandwidth between 25 and 60 Hz (span of 35 Hz) for a small sinusoidal acceleration of ... Read More
In this paper, we present the observation results of the surface potential of micropatterned thick (> 1 μm) self-assembled electrets (SAEs) for MEMS vibrational energy harvesters (VEHs). To eval ... Read More
Polymers are increasingly being used as flexible structural materials in MEMS. We have focused on UV-cured polydimethylsiloxane (UV-PDMS), which is both photoreactive and highly flexible. In this ... Read More
S&M3299Research Paper of Special Issue |
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S&M3299 Transfer of van der Waals Heterostructures of Two-dimensional Materials onto Microelectromechanical Systems Momoko Onodera and Tomoki Machida pp. 1929-1939 https://doi.org/10.18494/SAM4363 Published on June 27, 2023 PDF (open access) |
S&M3300Research Paper of Special Issue |
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S&M3300 MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging Hiroaki Honma, Sho Ikeno, and Hiroshi Toshiyoshi pp. 1941-1955 https://doi.org/10.18494/SAM4402 Published on June 27, 2023 PDF (open access) |
S&M3301Research Paper of Special Issue |
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S&M3301 Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response Gen Hashiguchi and Hiroshi Toshiyoshi pp. 1957-1983 https://doi.org/10.18494/SAM4367 Published on June 27, 2023 PDF (open access) |
S&M3302Research Paper of Special Issue |
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S&M3302 Observation of Surface Potential of Micropatterned Self-assembled Electrets for MEMS Vibrational Energy Harvesters Daisuke Yamane, Kosuke Kawashima, Reiki Sugimoto, Ruichen Li, Hideyuki Kayaguchi, Keisuke Kurihara, Hisao Ishii, and Yuya Tanaka pp. 1985-1993 https://doi.org/10.18494/SAM4400 Published on June 27, 2023 PDF (open access) |
S&M3303Research Paper of Special Issue |
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S&M3303 UV-curable Polydimethylsiloxane Photolithography and Its Application to Flexible Mechanical Metamaterials Ten Sekiguchi, Hidetaka Ueno, Vivek Anand Menon, Ryo Ichige, Yuya Tanaka, Hiroshi Toshiyoshi, and Takaaki Suzuki pp. 1995-2011 https://doi.org/10.18494/SAM4351 Published on June 27, 2023 PDF (open access) |
Cover of this Issue |
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