Vol. 31 No. 9(2)
Special Issue on Design, Fabrication, Characterization, and Application of MEMS
Guest Editor: Hiroyuki Fujita (Tokyo City University)
We develop an equivalent circuit model for a MEMS vibrational energy harvester that uses electrets or permanent electrical charges to generate electrostatic induction currents from mechanical vib ... Read More
This paper presents the design and optimization of planar poly-Si thermoelectric generators (TEGs) for energy harvesting application. Temperature and electric potential distributions are simulat ... Read More
The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this paper, we extend our work on the fabrication o ... Read More
A large set of micro and nanodevices requires hybrid vacuum packaging at the wafer-level to optimize their performances and lifetime. When the temperature of the packaging fabrication process is ... Read More
In this paper, a sliding electrical contact with an electroconductive liquid is presented. We have proposed a sliding contact using a combination of an electroconductive liquid and a dipped prob ... Read More
Valve metal oxide (anodized oxide) is used in a mirrored configuration to serve as self-limiting dielectric layers of electrowetting-on-dielectric (EWOD) devices. Resembling nonpolar electrolyti ... Read More
Micro-electromechanical systems (MEMS) tweezers developed for the trapping and characterization of bio molecules such as DNA are also capable of cell handling, which will enable further applicati ... Read More
In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being i ... Read More
Herein, we report an improved minimum detectable displacement on a surface stress biosensor using optical interferometry, allowing for the detection of a low biomarker concentration via antigen ... Read More
The first overseas laboratory of the Institute of Industrial Science (IIS), the University of Tokyo, SMMiL-E, Seeding Microsystems in Medicine in Lille–European Japanese Technologies against Ca ... Read More
S&M1972Research Paper of Special Issue |
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S&M1972 Analytical Model for MEMS Electret Energy Harvester with Long-stroke Tip-sliding Electrodes Yukiya Tohyama, Hiroaki Honma, Brieux Durand, Tatsuhiko Sugiyama, Gen Hashiguchi, and Hiroshi Toshiyoshi pp. 2779-2802 https://doi.org/10.18494/SAM.2019.2388 Published on September 20, 2019 PDF (open access) |
S&M1973Research Paper of Special Issue |
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S&M1973 Design of Planar Si Thermoelectric Generators with Phononic Crystal Patterning Masahiro Nomura, Ryoto Yanagisawa, Peter Zimmermann, Patrick Ruther, and Oliver Paul pp. 2803-2810 https://doi.org/10.18494/SAM.2019.2297 Published on September 20, 2019 PDF (open access) |
S&M1974Research Paper of Special Issue |
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S&M1974 Ultrasharp High-aspect-ratio Tetrahedral Molded Tips Rolf Vermeer, Erwin Berenschot, Edin Sarajlic, and Niels Tas pp. 2811-2823 https://doi.org/10.18494/SAM.2019.2255 Published on September 20, 2019 PDF (open access) |
S&M1975Review Paper of Special Issue |
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S&M1975 Effect of Environment on Activation and Sorption of Getter Alloys and Multilayers for Hybrid Wafer-level Vacuum Packaging Alain Bosseboeuf, Sylvain Lemettre, Ming Wu, Johan Moulin, Philippe Coste, Clément Bessouet, Sana Hammami, Charles Renard, and Laetitia Vincent pp. 2825-2849 https://doi.org/10.18494/SAM.2019.2312 Published on September 20, 2019 PDF (open access) |
S&M1976Research Paper of Special Issue |
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S&M1976 Sliding Contact Using Electroconductive Liquid and Its Application to Low-physical-restriction Micropotentiometer Satoshi Konishi pp. 2851-2860 https://doi.org/10.18494/SAM.2019.2246 Published on September 20, 2019 PDF (open access) |
S&M1977Research Paper of Special Issue |
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S&M1977 Counterbalanced Valve Metal Oxide as a Reliable Dielectric Layer for Electrowetting-on-dielectric Devices Supin Chen and Chang-Jin “CJ” Kim pp. 2861-2872 https://doi.org/10.18494/SAM.2019.2449 Published on September 20, 2019 PDF (open access) |
S&M1978Research Paper of Special Issue |
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S&M1978 Optimization of Surface Treatment on MEMS Probes for Single-cell Capture and Release Kensaku Hayashi, Momoko Kumemura, Shohei Kaneda, Vivek Menon, Laurent Jalabert, Saeko Tachikawa, Mehmet C. Tarhan, Teruo Fujii, Beomjoon Kim, and Hiroyuki Fujita pp. 2873-2881 https://doi.org/10.18494/SAM.2019.2322 Published on September 20, 2019 PDF (open access) |
S&M1979Research Paper of Special Issue |
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S&M1979 A MEMS Accelerometer for Sub-mG Sensing Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu pp. 2883-2894 https://doi.org/10.18494/SAM.2019.2122 Published on September 20, 2019 PDF (open access) |
S&M1980Research Paper of Special Issue |
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S&M1980 Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection Satoshi Maruyama, Yong Joon Choi, Kazuhiro Takahashi, and Kazuaki Sawada pp. 2895-2906 https://doi.org/10.18494/SAM.2019.2247 Published on September 20, 2019 PDF (open access) |
S&M1981Perspective of Special Issue |
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S&M1981 SMMiL-E, Japanese Bio-MEMS Laboratory in France, and the Role of Scientific Direction Teru Okitsu, Eric Leblanc, Dominique Collard, and Hiroyuki Fujita pp. 2907-2916 https://doi.org/10.18494/SAM.2019.2375 Published on September 20, 2019 PDF (open access) |
Cover of this Issue |
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