Vol. 30 No. 4(1)
Special Issue on Open Collaboration for MEMS
Guest Editor: Masayoshi Esashi (Tohoku University)
S&M153030th Commemorative Article |
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S&M1530 Wafer-level Packaging, Equipment Made in House, and Heterogeneous Integration Masayoshi Esashi pp. 683-691 https://doi.org/10.18494/SAM.2018.1638 Published on April 13, 2018 PDF (open access) |
S&M1531Perspective of Special Issue |
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S&M1531 Faster and More Cost-Effective Way to Success in MEMS R&D by Open Collaboration in Tohoku University Shuji Tanaka pp. 693-699 https://doi.org/10.18494/SAM.2018.1914 Published on April 13, 2018 PDF (open access) |
S&M1532Perspective of Special Issue |
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S&M1532 Accelerating MEMS Development by Open Collaboration at Hands-On-Access Fab, Tohoku University Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, and Masayoshi Esashi pp. 701-711 https://doi.org/10.18494/SAM.2018.1804 Published on April 13, 2018 PDF (open access) |
S&M1533Perspective of Special Issue |
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S&M1533 Development Services of MEMS-CORE Koji Homma pp. 713-722 https://doi.org/10.18494/SAM.2018.1799 Published on April 13, 2018 PDF (open access) |
S&M1534Perspective of Special Issue |
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S&M1534 Trillion Sensors and MEMS Susumu Kaminaga pp. 723-731 https://doi.org/10.18494/SAM.2018.1814 Published on April 13, 2018 PDF (open access) |
S&M1535Review Paper of Special Issue |
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S&M1535 CMOS-MEMS Resonators and Oscillators : A Review Chao-Yu Chen, Ming-Huang Li, and Sheng-Shian Li pp. 733-756 https://doi.org/10.18494/SAM.2018.1857 Published on April 13, 2018 PDF (open access) |
S&M1536Research Paper of Special Issue |
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S&M1536 Gas Sensing System Composed of IC-Foundry-Compatible Microcantilever, Advanced Sensing Material, and Intelligent Signal Processing Xin Peng, Yanqing Lv, Pengcheng Xu, Xinxin Li, Haitao Yu, and Jiaqiang Xu pp. 757-766 https://doi.org/10.18494/SAM.2018.1798 Published on April 13, 2018 PDF (open access) |
S&M1537Review Paper of Special Issue |
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S&M1537 Integrated Microsystems for Smart Applications Thomas Otto, Steffen Kurth, Sven Voigt, Andreas Morschhauser, Marco Meinig, Karla Hiller, Joerg Martin, and Martina Vogel pp. 767-778 https://doi.org/10.18494/SAM.2018.1797 Published on April 13, 2018 PDF (open access) |
S&M1538Perspective of Special Issue |
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S&M1538 Translational Engineering: Best Practices in Developing MEMS for Volume Manufacturing Alissa M. Fitzgerald, Keith M. Jackson, Charles C. Chung, and Carolyn D. White pp. 779-789 https://doi.org/10.18494/SAM.2018.1843 Published on April 13, 2018 PDF (open access) |
Cover of this Issue |
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