pp. 265-276
S&M117 Research Paper of Special Issue Published: 1992 Surface-Micromachined Microdiaphragm Pressure Sensors [PDF] Susumu Sugiyama, Keiichi Shimaoka and Osamu Tabata Cite this article Susumu Sugiyama, Keiichi Shimaoka and Osamu Tabata, Surface-Micromachined Microdiaphragm Pressure Sensors, Sens. Mater., Vol. 4, No. 5, 1992, p. 265-276. |