pp. 277-290
S&M118 Research Paper of Special Issue Published: 1992 Hybrid-Type Capacitive Pressure Sensor [PDF] Heedon Seo, Geunbae Lim and Masayoshi Esashi ![]() Cite this article Heedon Seo, Geunbae Lim and Masayoshi Esashi, Hybrid-Type Capacitive Pressure Sensor, Sens. Mater., Vol. 4, No. 5, 1992, p. 277-290. |