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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 26, Number 8 (2014)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 547-557
S&M1021 Research Paper of Special Issue https://doi.org/10.18494/SAM.2014.1014 Published: October 21, 2014 Development of a Piezo-driven Mechanical Stage Integrated Microdisplacement Sensor for Calibration of Displacements [PDF] Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi and Renshi Sawada (Received January 16, 2014; Accepted June 19, 2014) Keywords: displacement sensor, optical sensor, piezoelectric actuator, position control, hysteresis
We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 µm without control when the movement range of the mechanical stage is 84.4 µm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 µm.
Corresponding author: Toshihiro Takeshita Cite this article Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi and Renshi Sawada, Development of a Piezo-driven Mechanical Stage Integrated Microdisplacement Sensor for Calibration of Displacements, Sens. Mater., Vol. 26, No. 8, 2014, p. 547-557. |
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