pp. 85-100
S&M158 Research Paper of Special Issue Published: 1994 Self-Consistent Electromechanical Analysis of Complex 3-D Microelectromechanical Structures Using Relaxation/Multipole-Accelerated Method [PDF] Xuejun Cai, Peter Osterberg, He Yie, John Gilbert, Steve Senturia and Jacob White Cite this article Xuejun Cai, Peter Osterberg, He Yie, John Gilbert, Steve Senturia and Jacob White, Self-Consistent Electromechanical Analysis of Complex 3-D Microelectromechanical Structures Using Relaxation/Multipole-Accelerated Method, Sens. Mater., Vol. 6, No. 2, 1994, p. 85-100. |