pp. 53-64
S&M186 Research Paper of Special Issue Published: 1995 Design Consideration for Silicon Rectangular Diaphragm Pressure Sensor with Single-Element Four-Terminal Strain Gauge [PDF] Young-Tae Lee, Hee-Don Seo, Ryoichi Takano, Yoshinori Matsumoto, Makoto Ishida and Tetsuro Nakamura Cite this article Young-Tae Lee, Hee-Don Seo, Ryoichi Takano, Yoshinori Matsumoto, Makoto Ishida and Tetsuro Nakamura, Design Consideration for Silicon Rectangular Diaphragm Pressure Sensor with Single-Element Four-Terminal Strain Gauge, Sens. Mater., Vol. 7, No. 1, 1995, p. 53-64. |