pp. 85-90
S&M189 Research Paper of Special Issue Published: 1995 TEM Observations of Heavily Boron-Doped Etch-Stop Layers [PDF] Jong Uk Bu, Kyu Ho Park, In Sik Kim, Jeong Soo Lee, Sung-Tae Kim and Sook In Kwon Cite this article Jong Uk Bu, Kyu Ho Park, In Sik Kim, Jeong Soo Lee, Sung-Tae Kim and Sook In Kwon, TEM Observations of Heavily Boron-Doped Etch-Stop Layers, Sens. Mater., Vol. 7, No. 1, 1995, p. 85-90. |