pp. 331-346
S&M211 Research Paper Published: 1995 Novel Structures for Miniature Pressure Transducers Obtained by Electrochemical Etch-Stop on Diffused Membranes [PDF] Santiago Marco, Josep Samitier, Joan Ramon Morante, Andreas Götz and Jaume Esteve Cite this article Santiago Marco, Josep Samitier, Joan Ramon Morante, Andreas Götz and Jaume Esteve, Novel Structures for Miniature Pressure Transducers Obtained by Electrochemical Etch-Stop on Diffused Membranes, Sens. Mater., Vol. 7, No. 5, 1995, p. 331-346. |