pp. 331-346
S&M211 Research Paper Published: 1995 Novel Structures for Miniature Pressure Transducers Obtained by Electrochemical Etch-Stop on Diffused Membranes [PDF] Santiago Marco, Josep Samitier, Joan Ramon Morante, Andreas Götz and Jaume Esteve ![]() Cite this article Santiago Marco, Josep Samitier, Joan Ramon Morante, Andreas Götz and Jaume Esteve, Novel Structures for Miniature Pressure Transducers Obtained by Electrochemical Etch-Stop on Diffused Membranes, Sens. Mater., Vol. 7, No. 5, 1995, p. 331-346. |