pp. 347-360
S&M212 Research Paper Published: 1995 Measurements of Mechanical Behavior of Micromachined Aluminized Silicon and Silicon Nitride Diaphragms [PDF] Ralf Schellin, Gisela Heβ, Worfgang Kühnel, Christiane Thielemann, David Trost, Jörg Wacker and Ralf Steinmann Cite this article Ralf Schellin, Gisela Heβ, Worfgang Kühnel, Christiane Thielemann, David Trost, Jörg Wacker and Ralf Steinmann, Measurements of Mechanical Behavior of Micromachined Aluminized Silicon and Silicon Nitride Diaphragms, Sens. Mater., Vol. 7, No. 5, 1995, p. 347-360. |