pp. 303-316
S&M247 Research Paper Published: 1996 Thermally Driven Microvalve with Buckling Behavior for Pneumatic Applications [PDF] T. Lisec, H. J. Quenzer, M. Kreutzer, S. Hoerschelmann, B. Wagner and W. Benecke Cite this article T. Lisec, H. J. Quenzer, M. Kreutzer, S. Hoerschelmann, B. Wagner and W. Benecke, Thermally Driven Microvalve with Buckling Behavior for Pneumatic Applications, Sens. Mater., Vol. 8, No. 5, 1996, p. 303-316. |