pp. 485-492
S&M262 Research Paper of Special Issue Published: 1996 Semiconductor Sensors for Detecting TMA Gas [PDF] Sung Hyun Park, Hyek Hwan Choi and Tae Ha Kwon ![]() Cite this article Sung Hyun Park, Hyek Hwan Choi and Tae Ha Kwon, Semiconductor Sensors for Detecting TMA Gas, Sens. Mater., Vol. 8, No. 8, 1996, p. 485-492. |