pp. 31-40
S&M353 Research Paper of Special Issue Published: 1999 Silicon Angular Rate Sensor Using PZT Thin Film [PDF] Masaru Nagao, Kazuyuki Minami and Masayoshi Esashi ![]() Cite this article Masaru Nagao, Kazuyuki Minami and Masayoshi Esashi, Silicon Angular Rate Sensor Using PZT Thin Film, Sens. Mater., Vol. 11, No. 1, 1999, p. 31-40. |