pp. 105-110
S&M359 Research Paper Published: 1999 Use of Liquid Rubber in Micromachining Focused on Flexible Large-Area Biocompatible Membranes [PDF] Katarina Verhaegen, Kris Baert, Bob Puers, Willy Sansen, Lou Hermans and Robert Mertens ![]() Cite this article Katarina Verhaegen, Kris Baert, Bob Puers, Willy Sansen, Lou Hermans and Robert Mertens, Use of Liquid Rubber in Micromachining Focused on Flexible Large-Area Biocompatible Membranes, Sens. Mater., Vol. 11, No. 2, 1999, p. 105-110. |