pp. 353-364
S&M414 Research Paper of Special Issue Published: 2000 Single-Crystal Silicon Microbolometer and Evaluation of CO2 Measurement Results [PDF] Naoki Kishi, Hitoshi Hara, Nobuhiko Kanbara, Hideaki Yamagishi and Hideto Iwaoka Cite this article Naoki Kishi, Hitoshi Hara, Nobuhiko Kanbara, Hideaki Yamagishi and Hideto Iwaoka, Single-Crystal Silicon Microbolometer and Evaluation of CO2 Measurement Results, Sens. Mater., Vol. 12, No. 6, 2000, p. 353-364. |