pp. 375-388
S&M416 Research Paper of Special Issue Published: 2000 Development of Si Monolithic Ferroelectric-Microbolometer Using Pulsed-Laser-Deposited (Ba,Sr)TiO3 Thin-Film for Uncooled Chopperless Infrared Sensing [PDF] Minoru Noda, Huaping Xu, Tomonori Mukaigawa, Hong Zhu, Kazuhiko Hashimoto, Hiroyuki Kishihara, Ryuichi Kubo, Tatsuro Usuki and Masanori Okuyama Cite this article Minoru Noda, Huaping Xu, Tomonori Mukaigawa, Hong Zhu, Kazuhiko Hashimoto, Hiroyuki Kishihara, Ryuichi Kubo, Tatsuro Usuki and Masanori Okuyama, Development of Si Monolithic Ferroelectric-Microbolometer Using Pulsed-Laser-Deposited (Ba,Sr)TiO3 Thin-Film for Uncooled Chopperless Infrared Sensing, Sens. Mater., Vol. 12, No. 6, 2000, p. 375-388. |