pp. 375-388
S&M416 Research Paper of Special Issue Published: 2000 Development of Si Monolithic Ferroelectric-Microbolometer Using Pulsed-Laser-Deposited (Ba,Sr)TiO3 Thin-Film for Uncooled Chopperless Infrared Sensing [PDF] Minoru Noda, Huaping Xu, Tomonori Mukaigawa, Hong Zhu, Kazuhiko Hashimoto, Hiroyuki Kishihara, Ryuichi Kubo, Tatsuro Usuki and Masanori Okuyama ![]() Cite this article Minoru Noda, Huaping Xu, Tomonori Mukaigawa, Hong Zhu, Kazuhiko Hashimoto, Hiroyuki Kishihara, Ryuichi Kubo, Tatsuro Usuki and Masanori Okuyama, Development of Si Monolithic Ferroelectric-Microbolometer Using Pulsed-Laser-Deposited (Ba,Sr)TiO3 Thin-Film for Uncooled Chopperless Infrared Sensing, Sens. Mater., Vol. 12, No. 6, 2000, p. 375-388. |