pp. 235-246
S&M445 Research Paper Published: 2001 Platinum Patterning by a Modified Lift-Off Technique and Its Application in a Silicon Load Cell [PDF] H. D. Tong, R. A. F. Zwijze, J. W. Berenschot, R. J. Wiegerink, G. J. M. Krijnen and M. C. Elwenspoek Cite this article H. D. Tong, R. A. F. Zwijze, J. W. Berenschot, R. J. Wiegerink, G. J. M. Krijnen and M. C. Elwenspoek, Platinum Patterning by a Modified Lift-Off Technique and Its Application in a Silicon Load Cell, Sens. Mater., Vol. 13, No. 4, 2001, p. 235-246. |