pp. 235-246
S&M445 Research Paper Published: 2001 Platinum Patterning by a Modified Lift-Off Technique and Its Application in a Silicon Load Cell [PDF] H. D. Tong, R. A. F. Zwijze, J. W. Berenschot, R. J. Wiegerink, G. J. M. Krijnen and M. C. Elwenspoek ![]() Cite this article H. D. Tong, R. A. F. Zwijze, J. W. Berenschot, R. J. Wiegerink, G. J. M. Krijnen and M. C. Elwenspoek, Platinum Patterning by a Modified Lift-Off Technique and Its Application in a Silicon Load Cell, Sens. Mater., Vol. 13, No. 4, 2001, p. 235-246. |