pp. 351-358
S&M455 Research Paper of Special Issue Published: 2001 Application of Dual-Doped TMAH Silicon Etchant in the Fabrication of a Micromachined Aluminum Flexing Beam Actuator [PDF] John Garra, Sebastiano Brida, Lorenza Ferrario and Makarand Paranjape Cite this article John Garra, Sebastiano Brida, Lorenza Ferrario and Makarand Paranjape, Application of Dual-Doped TMAH Silicon Etchant in the Fabrication of a Micromachined Aluminum Flexing Beam Actuator, Sens. Mater., Vol. 13, No. 6, 2001, p. 351-358. |