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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 14, Number 5 (2002)
Copyright(C) MYU K.K.
pp. 253-262
S&M487 Research Paper of Special Issue
Published: 2002

High-Sensitivity Hybrid Hall Effect ICs with Thin Film Hall Elements [PDF]

Kazutoshi Ishibashi, Ichiro Okada and Ichiro Shibasaki

Keywords: magnetic sensor, digital magnetic sensor, Hall IC, hybrid Hall effect IC, hybrid Hall IC, InSb Hall element, InAs Hall element, InAs deep quantum well (DQW) Hall element

New digital magnetic sensors which consist of a compound semiconductor thin film magnetic sensor and a silicon-IC signal processing circuit in a package called hybrid Hall IC were studied. The InSb and InAs thin film Hall elements and InAs DQW Hall element were used as magnetic sensors to form the hybrid Hall ICs. These hybrid Hall ICs have a very simple structure and exhibit high sensitivity and stability. Moreover, they exhibit great potential as contactless sensors.


Cite this article
Kazutoshi Ishibashi, Ichiro Okada and Ichiro Shibasaki, High-Sensitivity Hybrid Hall Effect ICs with Thin Film Hall Elements, Sens. Mater., Vol. 14, No. 5, 2002, p. 253-262.



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