pp. 253-262
S&M487 Research Paper of Special Issue Published: 2002 High-Sensitivity Hybrid Hall Effect ICs with Thin Film Hall Elements [PDF] Kazutoshi Ishibashi, Ichiro Okada and Ichiro Shibasaki Keywords: magnetic sensor, digital magnetic sensor, Hall IC, hybrid Hall effect IC, hybrid Hall IC, InSb Hall element, InAs Hall element, InAs deep quantum well (DQW) Hall element
New digital magnetic sensors which consist of a compound semiconductor thin film magnetic sensor and a silicon-IC signal processing circuit in a package called hybrid Hall IC were studied. The InSb and InAs thin film Hall elements and InAs DQW Hall element were used as magnetic sensors to form the hybrid Hall ICs. These hybrid Hall ICs have a very simple structure and exhibit high sensitivity and stability. Moreover, they exhibit great potential as contactless sensors.
Cite this article Kazutoshi Ishibashi, Ichiro Okada and Ichiro Shibasaki, High-Sensitivity Hybrid Hall Effect ICs with Thin Film Hall Elements, Sens. Mater., Vol. 14, No. 5, 2002, p. 253-262. |