pp. 13-24
S&M544 Research Paper Published: 2004 Efficient Coupling of Electrostatic Optical Fiber Switch [PDF] Cheng-Tang Pan, Sheng-Chih Shen and Hsiharng Yang (Received June 23, 2003; Accepted November 25, 2003) Keywords: out-of-plane, micro-ball lens, optical switch, diaphragm, electrostatic, coupling
The study presents a novel concept of a coupling platform integrated with an out-ofplane optical switch and micro-ball lens array. The micro-ball lens array is batchfabricated with the micro electro mechanical system (MEMS) technique and batchassembled onto the platform. The out-of-plane optical switch consists of a self-latching vertical mirror on a suspension diaphragm. It can reduce the large motion space required for in-plane optical switches. The optical platform design enables control of the distance between the fiber, micro-ball lens and out-of-plane optical switch and increases their coupling efficiency. An electrostatic driving voltage is used to actuate the optical switch. Not only does this fabrication process provide an accurate coupling distance, it also reduces the micro-assembly cost.
Corresponding author: Cheng-Tang PanCite this article Cheng-Tang Pan, Sheng-Chih Shen and Hsiharng Yang, Efficient Coupling of Electrostatic Optical Fiber Switch, Sens. Mater., Vol. 16, No. 1, 2004, p. 13-24. |