pp. 231-239
S&M561 Research Paper of Special Issue Published: 2004 Preparation of PbSc0.5Ta0.5O3 Ferroelectric Thin Films For Infrared Detection by Pulsed Laser Deposition [PDF] Shuichi Murakami, Daniel Popovici, Kazuo Satoh, Mitsuteru Matsumoto, Minoru Noda and Masanori Okuyama (Received April 7, 2004; Accepted August 4, 2004) Keywords: ferroelectric thin film, PbSc0.5Ta0.5O3, infrared sensor of dielectric bolometer mode
Preferentially (222)-oriented PbSc0.5Ta0.5O3 (PST) thin films were prepared on Pt/Ti/SiO2/Si substrates by pulsed laser deposition at a temperature as low as 400℃. Their ferroelectric properties were improved by postdeposition annealing at 500℃, where the polarization at zero electric field was 1.4 µC/cm2. The temperature coefficient of the dielectric constant (TCD) was also improved to 1.1%/K at 25℃, indicating that the PST thin film is a promising candidate material for use in an infrared image sensor of dielectric bolometer mode, which is based on the temperature dependence of the dielectric constant.
Corresponding author: Shuichi MurakamiCite this article Shuichi Murakami, Daniel Popovici, Kazuo Satoh, Mitsuteru Matsumoto, Minoru Noda and Masanori Okuyama, Preparation of PbSc0.5Ta0.5O3 Ferroelectric Thin Films For Infrared Detection by Pulsed Laser Deposition, Sens. Mater., Vol. 16, No. 5, 2004, p. 231-239. |