pp. 87-95
S&M589 Research Paper of Special Issue Published: 2005 Multifunctional Probe for Chemical Stimulation and Neural Signal Recording [PDF] Kyo-in Koo, Jung-Min Lim, Seung-Joon Paik, Jaehong Park, Sangwon Byun, Ahra Lee, Sungil Park, Taeyong Song, HyunMin Choi, Myoung-Jun Jeong and Dong-il "Dan" Cho (Received April 10, 2004; Accepted November 16, 2004) Keywords: microchannel, microelectrode, low impedance, neural probe
This paper presents a single-unit neural probe which functions both as a neural signal recorder and a chemical stimulator. The single-unit neural probe contains in-plane shanks with buried microchannels and low-impedance microelectrodes that are fabricated using the roughened polysilicon process. The fabricated neural probe has three 3-mm-long shanks with 10-m-diameter microchannels, and six 30 m 30 m gold microelectrodes per shank. The impedance magnitude and phase shift of the microelectrodes are 317 k / 900 m 2 and –56.2 at 1 kHz, respectively.
Corresponding author: Dong-il “Dan” ChoCite this article Kyo-in Koo, Jung-Min Lim, Seung-Joon Paik, Jaehong Park, Sangwon Byun, Ahra Lee, Sungil Park, Taeyong Song, HyunMin Choi, Myoung-Jun Jeong and Dong-il "Dan" Cho, Multifunctional Probe for Chemical Stimulation and Neural Signal Recording, Sens. Mater., Vol. 17, No. 2, 2005, p. 87-95. |