pp. 217-227
S&M1059 Research Paper https://doi.org/10.18494/SAM.2015.1060 Published: March 12, 2015 SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate [PDF] Koji Oishi, Shota Yonemaru, Daisuke Akai and Makoto Ishida (Received September 11, 2014; Accepted November 25, 2014) Keywords: γ-Al2O3, Pb(Zr,Ti)O3, pyroelectric sensor, infrared absorber
In this study, Pb(Zr0.4,Ti0.6)O3 (PZT) film pyroelectric infrared sensors were fabricated on a Si substrate with a SiO2/SiN multilayer-stack infrared (IR) absorber and characterized. Since an IR absorber is a critical element that determines the sensitivity of IR sensors, we have proposed a multilayer-stack IR absorber based on complementary metal-oxide-semiconductor (CMOS) compatible materials for the PZT film pyroelectric sensor. We designed and fabricated a SiO2/SiN multilayer-stack IR absorber that possesses a broad and high IR absorptance in the wavelength range from 8 to 14 µm. The thicknesses of the SiO2 and SiN films were designed as 550 and 850 nm, respectively, according to the calculation result of absorptance in the multilayer films. The SiO2/SiN multilayer-stack absorber was integrated on PZT film sensors by plasma-enhanced chemical vapor deposition, and 86% average IR absorptance was obtained in the wavelength range from 8 to 14 µm. A specific detectivity of 1.15 × 107 cmHz0.5/W was achieved at 30 Hz on the PZT film pyroelectric sensor.
Corresponding author: Koji OishiCite this article Koji Oishi, Shota Yonemaru, Daisuke Akai and Makoto Ishida, SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate, Sens. Mater., Vol. 27, No. 2, 2015, p. 217-227. |