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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 18, Number 2 (2006)
Copyright(C) MYU K.K.
pp. 83-90
S&M632 Research Paper
Published: 2006

Improvement of Thin-Film Multijunction Thermal Converters at KRISS [PDF]

Young Hwa Lee, Young Eon Ihm, Sung Won Kwon, Kook Jin Kim and Se Il Park

(Received September 22, 2005; Accepted April 3, 2006)

Keywords: multijunction thermal converter (MJTC), thermoelectric effect, voltage sensitivity, ac-dc transfer difference

Thin-film multijunction thermal converters (MJTCs) were fabricated using silicon semiconductor production and bulk micromachining. The converters consisted of a bifilar heater and thermocouple hot junctions on the Si3N4/SiO2/Si3N4 membrane and cold junctions supported by the silicon frame. The voltage sensitivity of the converter was 21.41 V/ W in vacuum, which is higher than 5.82 V/W in air. In the case of a 500-nm-thick heater, the ac-dc transfer differences taken at 1 V and 40 Hz were 42.1 ppm in air and 11.8 ppm in vacuum. The ac-dc transfer differences were stabilized below 1 ppm in the frequency range from 1 kHz to 500 kHz. A process of fabricating advanced converters with a thermal island under the heater to decrease ac-dc transfer difference at low frequencies was developed. In the case of the converter, the transfer difference was about 2.9 ppm at 1.0 V and 40 Hz.

Corresponding author: Se Il Park


Cite this article
Young Hwa Lee, Young Eon Ihm, Sung Won Kwon, Kook Jin Kim and Se Il Park, Improvement of Thin-Film Multijunction Thermal Converters at KRISS, Sens. Mater., Vol. 18, No. 2, 2006, p. 83-90.



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