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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 28, Number 2 (2016)
Copyright(C) MYU K.K.
pp. 131-139
S&M1163 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2016.1241
Published: February 24, 2016

Parametrically Actuated Resonant Micromirror Using Stiffness Tunable Torsional Springs [PDF]

Yusuke Kawai, Jin-Hyeok Kim, Naoki Inomata, and Takahito Ono

(Received August 31, 2015; Accepted October 28, 2015)

Keywords: micromirror, parametric amplification, hard spring effect, frequency tuning, torsional spring

In this study, we design, fabricate and evaluate a resonant micromirror that can amplify the vibration amplitude by mechanical parametric amplification. It is shown that the spring constant of torsion bars supporting the micromirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional mode. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator in addition to a driving signal. As the driving power increases, the resonant frequency increases owing to the nonlinear spring effect of the torsional spring. However, the frequency shift can be compensated for by applying stress to the torsional spring using the frequency tuning mechanism for the reliable operation of the micromirror.

Corresponding author: Takahito Ono


Cite this article
Yusuke Kawai, Jin-Hyeok Kim, Naoki Inomata, and Takahito Ono, Parametrically Actuated Resonant Micromirror Using Stiffness Tunable Torsional Springs, Sens. Mater., Vol. 28, No. 2, 2016, p. 131-139.



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