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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 30, Number 12(1) (2018)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2761-2772
S&M1715 30th Commemorative Article https://doi.org/10.18494/SAM.2018.1773 Published: December 10, 2018 Ideal Sensor Chips - A Smart Microsensor Chip with LSI and MEMS Process and Materials - [PDF] Makoto Ishida (Received October 11, 2017; Accepted November 15, 2017) Keywords: sensor chip with LSI, CMOS and MEMS process, SOI material and devices, VLS probe chip, pH image sensor
The sensor chips developed in Toyohashi University of Technology and the facility called the “LSI factory” since 1979 were reviewed. The original and unique devices were fabricated using not only the standard Si-LSI process and materials, but also the MEMS process and materials. Researchers including students can fabricate their own devices by themselves, which could lead to the production of original prototype devices using special processes and materials together with the CMOS process. Demonstrating the devices is more persuasive than theoretically explaining them in this manuscript. Aside from its educational use, this explains the existence of the LSI factory in Toyohashi University.
Corresponding author: Makoto Ishida Cite this article Makoto Ishida, Ideal Sensor Chips - A Smart Microsensor Chip with LSI and MEMS Process and Materials -, Sens. Mater., Vol. 30, No. 12, 2018, p. 2761-2772. |
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