pp. 1053-1061
S&M1562 Research Paper of Special Issue https://doi.org/10.18494/SAM.2018.1833 Published: May 31, 2018 Expansion of Hull Method to 3-Dimentional Crystal Anisotropic Etching Simulation [PDF] Meng Zhao, Jing Ji, and Toshitsugu Ueda (Received December 1, 2017; Accepted May 8, 2018) Keywords: crystal, etching, simulation, Hull method, 3-dimentional
We present here a new approach to simulate three-dimensional vertex etching, which is applicable to quartz crystals and other crystal so. In this paper we describe the theoretical method behind this approach and give details regarding processing the vertex, processing the edges, distinguishing four types of vertexes, and determining the etching depth of each vertex point.
Corresponding author: Meng ZhaoCite this article Meng Zhao, Jing Ji, and Toshitsugu Ueda, Expansion of Hull Method to 3-Dimentional Crystal Anisotropic Etching Simulation, Sens. Mater., Vol. 30, No. 5, 2018, p. 1053-1061. |