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S&M1553 30th Commemorative Article https://doi.org/10.18494/SAM.2018.1856 Published: May 18, 2018 Toward Sensor Intelligence in MEMS Technology [PDF] Kazusuke Maenaka (Received December 17, 2017; Accepted January 15, 2018) Keywords: integrated sensor, intelligent sensor, smart sensor, combo sensor, sensor network
In the past 30 years, remarkable progress has been made in the field of MEMS sensors. The journal Sensors and Materials has reached its 30th year and has been documenting the progress of microsensor technology. Also, I have been working on MEMS sensors for around 30 years, and watching the progress of the MEMS field. Recently, almost all physical sensors have been realized by MEMS technology and many dreams and expectations in the old days have become real devices. In this paper, I will focus on intelligence or smartness of sensors as the subject with some historical aspects.
Corresponding author: Kazusuke MaenakaCite this article Kazusuke Maenaka, Toward Sensor Intelligence in MEMS Technology, Sens. Mater., Vol. 30, No. 5, 2018, p. 947-956. |