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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 31, Number 4(3) (2019)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1325-1334
S&M1859 Research Paper https://doi.org/10.18494/SAM.2019.2235 Published: April 30, 2019 Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Köhler Illumination by XeF2 Vapor Etching [PDF] Akihiro Matsutani, Mina Sato, Koichi Hasebe, and Ayako Takada (Received December 11, 2018; Accepted March 29, 2019) Keywords: single-cell isolation, concave micromirror, XeF2, etching, Si, cell trapping
We demonstrated a Si-based concave micromirror array for cell trapping that was fabricated by XeF2 vapor etching. We also examined the optical properties of the focal image of each concave micromirror. In addition, yeast cell trapping was realized at the focal point of a concave micromirror of approximately 35 μm diameter by Köhler illumination using a halogen lamp. The proposed process is useful for the microfabrication of various Si-based microstructure devices, such as microchannels and micro-electromechanical systems (MEMS).
Corresponding author: Akihiro Matsutani  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Akihiro Matsutani, Mina Sato, Koichi Hasebe, and Ayako Takada, Microfabrication of Concave Micromirror for Microbial Cell Trapping Using Köhler Illumination by XeF2 Vapor Etching, Sens. Mater., Vol. 31, No. 4, 2019, p. 1325-1334. |
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