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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 31, Number 8(2) (2019)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2497-2509
S&M1951 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2420 Published: August 19, 2019 Sol–Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols [PDF] Masaaki Moriyama, Kentaro Totsu, and Shuji Tanaka (Received May 2, 2019;; Accepted July 23, 2019) Keywords: lead zirconate titanate (PZT), sol–gel method, rapid thermal annealing (RTA), X-ray diffraction (XRD), ferroelectric property, piezoelectric constant
The sol–gel technique is a major deposition method of lead zirconate titanate (PZT), because of its good uniformity and simplicity. At present, different PZT sols are commercially available, and users are interested in which sol best fits their application and deposition tool. In this study, PZT thin films were deposited using different commercial sols, and their characteristics were evaluated and compared in terms of film thickness, crystal orientation, and ferroelectric property. We found that a rapid thermal annealing (RTA) temperature of 650 ℃ and a drying temperature of 180 ℃ were suitable as starting conditions regardless of the PZT sol. Under these conditions, the piezoelectric constant d31 is more than 75 pm/V. Optimization can be carried out efficiently by each user under these conditions.
Corresponding author: Masaaki Moriyama  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Masaaki Moriyama, Kentaro Totsu, and Shuji Tanaka, Sol–Gel Deposition and Characterization of Lead Zirconate Titanate Thin Film Using Different Commercial Sols, Sens. Mater., Vol. 31, No. 8, 2019, p. 2497-2509. |
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