pp. 3517-3526
S&M2027 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2500 Published: November 15, 2019 Determination of the Refractive Index of Molybdenum Using a Spectrophotometric Method [PDF] Donyau Chiang, Po-Kai Chiu, Yu-Chen Hsieh, Wen-Tse Hsiao, and Shih-Feng Tseng (Received April 15, 2019; Accepted September 4, 2019) Keywords: refractive index, extinction coefficient, spectrophotometry, molybdenum, simulation
The refractive indexes of thin films are determined by spectrophotometric measurement in the ultraviolet-to-near-infrared spectral range on a high-absorption metal, molybdenum, as an example. In our theoretical derivative, the refractive indexes of a substrate with and without low absorption are calculated first and then that of the combined film stack is calculated. Both solutions are obtained by the Newton–Raphson iteration method. The calculated refraction index is 1.64–2.88 and the extinction coefficient is 2.76–4.52, which are within the measured ranges for the Mo film. Both indexes increase monotonically with the wavelength in the visible and near-infrared ranges.
Corresponding author: Po-Kai ChiuThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Donyau Chiang, Po-Kai Chiu, Yu-Chen Hsieh, Wen-Tse Hsiao, and Shih-Feng Tseng, Determination of the Refractive Index of Molybdenum Using a Spectrophotometric Method, Sens. Mater., Vol. 31, No. 11, 2019, p. 3517-3526. |