pp. 3343-3354
S&M2343 Research Paper of Special Issue https://doi.org/10.18494/SAM.2020.2918 Published: October 30, 2020 Positional Regulation of Electrostatic Micro-electromechanical Actuator via Adaptive Two-stage Sliding Mode Control [PDF] Chi-Hsin Yang, Kun-Chieh Wang, and Long Wu (Received March 31, 2020; Accepted August 7, 2020) Keywords: micro-electromechanical (MEM) actuator, positional regulation, adaptive, sliding mode control
In this study, we examine an adaptive two-stage sliding mode control scheme for an electrostatically actuated micro-electromechanical (MEM) actuator. The objective of the control scheme is to regulate the position of the movable plate in the MEM actuator by voltage control. For accurate measurements of system states, direct detection is possible by means of an existing sensing technique. Two main steps are applied to design the closed-loop control system. Firstly, for the dynamical model of the MEM actuator, a normalized time-scale approach and a nonlinear state transformation are introduced. Then, the adaptive two-stage sliding mode control is designed to achieve the control goal. The stability of the closed-loop control is proven and numerical studies to verify the control scheme are also performed.
Corresponding author: Kun-Chieh WangThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Chi-Hsin Yang, Kun-Chieh Wang, and Long Wu, Positional Regulation of Electrostatic Micro-electromechanical Actuator via Adaptive Two-stage Sliding Mode Control, Sens. Mater., Vol. 32, No. 10, 2020, p. 3343-3354. |