Sensors and Materials

Young Researcher Paper Award 2025
🥇Winners

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.

Tweets by Journal_SandM Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English 日本語

Instructions for manuscript preparation
English 日本語

Template
English

Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.

MYU Research
(proofreading and recording)

MYU K.K.
(translation service)

The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 33, Number 2(1) (2021)
Copyright(C) MYU K.K.

pp. 569-574
S&M2476 Research Paper
https://doi.org/10.18494/SAM.2021.3156
Published: February 8, 2021

Surface Treatment of Polydimethylsiloxane and Glass Using Solid-source H2O Plasma for Fabrication of Microfluidic Devices [PDF]

Mie Tohnishi and Akihiro Matsutani

(Received November 2, 2020; Accepted December 11, 2020)

Keywords: heterogeneous material bonding, plasma treatment, H2O plasma, PDMS, microfluidic devices

We demonstrate a method of bonding between polydimethylsiloxane (PDMS) and crown glass surfaces using solid-source H2O plasma for the fabrication of microfluidic devices. We used a plasma treatment system with H2O vapor supplied from solid H2O (ice) in a beaker placed in a process chamber. The bonding between PDMS and crown glass surfaces was achieved at a contact angle lower than 50° one hour after plasma treatment. In addition, we confirmed that the materials were completely bonded with a bonding force of at least 9 N/cm². We also observed the low-speed laminar flow of two layers from the confluence point to the entrance of the tube of the outlet in a microchannel device fabricated using the solid-source H2O plasma treatment.

Corresponding author: Mie Tohnishi

This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Mie Tohnishi and Akihiro Matsutani, Surface Treatment of Polydimethylsiloxane and Glass Using Solid-source H2O Plasma for Fabrication of Microfluidic Devices, Sens. Mater., Vol. 33, No. 2, 2021, p. 569-574.