pp. 2531-2535
S&M2636 Letter https://doi.org/10.18494/SAM.2021.3442 Published: July 27, 2021 Preparation of (511)-oriented BaTi2O5 Thick Film on Pt/MgO(111) Substrate by Laser Chemical Vapor Deposition [PDF] Xiaojie Yang and Dongyun Guo (Received May 26, 2021; Accepted June 22, 2021) Keywords: BaTi2O5 thick film, laser chemical vapor deposition, orientation, dielectric property
A BaTi2O5 film was deposited on a Pt-coated MgO(111) single-crystal substrate by laser chemical vapor deposition. The crystal structure, morphologies, and dielectric properties of the film were investigated. A single-phase BaTi2O5 thick film with (511) orientation was obtained at a high deposition rate of 65.1 μm/h and consisted of rhombic grains with a columnar cross section. The (511)-oriented BaTi2O5 thick film had a dielectric constant of 75 and a dielectric loss of 0.015 at 300 K and 1 MHz, and its Curie temperature (TC) was approximately 720 K, indicating its potential application in capacitors.
Corresponding author: Dongyun GuoThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Xiaojie Yang and Dongyun Guo, Preparation of (511)-oriented BaTi2O5 Thick Film on Pt/MgO(111) Substrate by Laser Chemical Vapor Deposition, Sens. Mater., Vol. 33, No. 7, 2021, p. 2531-2535. |