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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 34, Number 1(2) (2022)
Copyright(C) MYU K.K.
pp. 163-173
S&M2801 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2022.3554
Published in advance: December 27, 2021
Published: January 27, 2022

Gas Sensor Array with Polymer-carbon Glue Composite Structures for Neural Network Application [PDF]

Bo-Chun Yang and Yu-Jen Hsiao

(Received May 18, 2021; Accepted December 6, 2021)

Keywords: gas sensor, sensor array, volatile organic compounds, neural network, stacked composite membranes

In this study, we focus on the gas sensor array with semiconductor and neural network applications. Two different sensing membranes, namely, diluted conductive water-soluble carbon glue and polymer-carbon glue stacked membranes, were used for experiments to compare the differences and correlations between multiple polymers and multiple gases. In the experiments, the reactions of 13 different polymers with five gases (air, ethanol, CO, NO2, and NH3) were tested. A set of sixteen array sensors with a line width of 50 µm and a sensing diameter of 3 mm were used, and such sensors were coated with a 300-nm-thick aluminum-doped zinc oxide (AZO) layer on the wafer surface. The gas sensitivity obtained using various polymers dripped on the sensing area was tested, and the sensitivity of small low-energy heterogeneous gas-sensing elements is discussed. It is concluded that the various gases considered have good separation properties and excellent selectivity and reproducibility. Among the two different sensing membranes, the gas reaction ratio of (ΔR/R)max = 149% is the most prominent relative to the resistance of carbon glue in reference to the air baseline; as a result, the carbon membrane showed a higher gas sensitivity than the polymer-carbon membrane.

Corresponding author: Yu-Jen Hsiao


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Cite this article
Bo-Chun Yang and Yu-Jen Hsiao, Gas Sensor Array with Polymer-carbon Glue Composite Structures for Neural Network Application, Sens. Mater., Vol. 34, No. 1, 2022, p. 163-173.



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