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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 34, Number 5(4) (2022)
Copyright(C) MYU K.K.
pp. 2007-2013
S&M2950 Technical Paper of Specal Issue
https://doi.org/10.18494/SAM3911
Published: May 31, 2022

Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications [PDF]

Shih-Hung Lin, Chi-Hang Siu, Yuan-Ting Wang, and Yao-Chin Wang

(Received March 31, 2022; Accepted May 12, 2022)

Keywords: inspection, IGZO, thin-film transistor, foldable device

In this study, we report the flaw detection properties of amorphous In–Ga–Zn–O (IGZO)-based active-matrix thin-film transistors (TFTs) on foldable device applications. Foldable and thinned-glass substrates are two different types of critical flexible substrate for defect inspection, which are also difficult to check by traditional in situ inspection techniques for mass production. The technique we proposed is based on the noninvasive optoelectronic transforming principle to inspect flaw pixels, with the advantages of an ultrahigh resolution, a small pixel array, and no contact damage. This method can be applied to foldable substrates with an ultrahigh-definition (UHD) TFT array panel and digital X-ray detectors. The experimental data showed good flaw detection rate (>90.1%) and fail detection rate (<4.9%).

Corresponding author: Yao-Chin Wang


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Cite this article
Shih-Hung Lin, Chi-Hang Siu, Yuan-Ting Wang, and Yao-Chin Wang, Optoelectronics Inspection of Amorphous In–Ga–Zn–O-based Active-matrix Thin-film Transistor Array for Foldable Substrate Applications, Sens. Mater., Vol. 34, No. 5, 2022, p. 2007-2013.



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