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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 35, Number 5(3) (2023)
Copyright(C) MYU K.K.
pp. 1753-1765
S&M3285 Research Paper
https://doi.org/10.18494/SAM4007
Published: May 25, 2023

Low-power-consumption Circuit for MEMS Thermal Wind Sensors Operated in Constant-temperature-difference Mode [PDF]

Xingheng Luo, Ming Qin, and Qing-An Huang

(Received August 4, 2022; Accepted April 4, 2023)

Keywords: MEMS thermal wind sensor, constant-temperature-difference (CTD) mode, low power consumption, DC/DC converter, switching mode power supply (SMPS)

In this paper, the traditional control circuit of the constant-temperature-difference (CTD) mode for a MEMS thermal wind sensor is introduced and analyzed. Then it is demonstrated that the transistor in this closed-loop control circuit has high power consumption owing to its use as a modulator with low conversion efficiency to supply a high current for the Wheatstone bridge. To reduce unnecessary power consumption, the use of a DC/DC converter with high conversion efficiency in the switching mode power supply is proposed to replace the transistor in a new low-power-consumption control circuit of the CTD mode. Then the loop stability and the performance of the new control circuit in reducing the power consumption are verified by simulation. Finally, power-consumption experiments are performed on the traditional and new control circuits in a laminar flow wind tunnel. The experimental results show the capability of the new low-power-consumption control circuit to reduce the total power consumption of the control circuit by 20 to 40% at wind speeds from 0 to 30 m/s by replacing the transistor with the DC/DC converter.

Corresponding author: Ming Qi


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This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Xingheng Luo, Ming Qin, and Qing-An Huang, Low-power-consumption Circuit for MEMS Thermal Wind Sensors Operated in Constant-temperature-difference Mode, Sens. Mater., Vol. 35, No. 5, 2023, p. 1753-1765.



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