We investigated the microstructures and electrical properties of Nd(Zn0.5Ti0.5)O3 thin films fabricated using the sol-gel method at various preheating temperatures and annealing temperatures. The composites and their morphological characteristics were analyzed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) and were found to be sensitive to both the preheating temperature (100–300 ℃) and annealing temperature (600–800 ℃). The diffraction pattern indicated that the deposited films exhibit a polycrystalline microstructure. The dielectric constant and leakage current density of the Nd(Zn0.5Ti0.5)O3 thin films at a preheating temperature of 300 ℃ and an annealing temperature of 700 oC were 16 and 2.13 × 10−8, respectively. The experimental data for Nd(Zn0.5Ti0.5)O3 thin films can be applied to wireless communication microwave components, such as temperature-sensing antennas.