pp. 4085-4094
S&M3098 Research Paper of Special Issue https://doi.org/10.18494/SAM4081 Published: November 24, 2022 Flatness and Thickness Measurements of Circular Plate Component Using Laser Distance Meter [PDF] Yen Liang Yeh, Bin-Hao Chen, Shih Hung Chen, and Chun Te Lee (Received May 25, 2022; Accepted October 28, 2022) Keywords: flatness measurement, thickness measurement, circular plate, laser distance meter, Abbe angle
In this paper, we propose an innovative method for measuring the thickness, flatness, and Abbe angle of a disc. This innovative method includes three laser distance meters and one standard plate. In general, the three laser distance meters are used to determine the thickness and flatness of a disc. The Abbe angle is determined using the laser distance meter and reference plate. Our analytical results show that the proposed method can be used to obtain the precise thickness and flatness of a disc. The resolution of the measurement method is 1 μm. The flatness is measured by the least squares method. The front and back laser distance meters simultaneously measure the warp and wrinkle. The maximum deviation of the measured thickness of a disc is reduced by using two laser distance meters to determine the effects of warp and wrinkle. The thickness, flatness, warp, and wrinkle of a disc are measured quickly and conveniently.
Corresponding author: Yen Liang YehThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Yen Liang Yeh, Bin-Hao Chen, Shih Hung Chen, and Chun Te Lee, Flatness and Thickness Measurements of Circular Plate Component Using Laser Distance Meter, Sens. Mater., Vol. 34, No. 11, 2022, p. 4085-4094. |