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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials, Volume 35, Number 3(4) (2023)
Copyright(C) MYU K.K.
pp. 1141-1148
S&M3235 Research Paper of Special Issue
https://doi.org/10.18494/SAM4239
Published: March 31, 2023

Micro-electromechanical System Gas SensorsBased on CeO2 Nanoparticles [PDF]

Tang-Yu Lai, Guan-Cheng Chen, and Yu-Jen Hsia

(Received October 23, 2022; Accepted February 8, 2023)

Keywords: cerium oxide, MEMS gas sensor, hydrogen

In this study, X-ray diffraction (XRD) analysis was used to show that cerium oxide (CeO2) nanoparticles have a face-centered cubic structure. CeO2 thin films on micro-electromechanical system (MEMS) gas sensors, which are used to test their sensitivity to hydrogen (H2), were prepared by dip coating. The test power of 116 mW (~300 ℃) is the power consumption of different gas concentrations. Different gases such as NH3, CO, and NO2 were also tested and compared. The results showed that CeO2 has a higher response at 50 ppm than at other concentrations. The structure of the CeO2 material and its reaction mechanism with H2 were examined and discussed.

Corresponding author: Tang-Yu Lai


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Cite this article
Tang-Yu Lai, Guan-Cheng Chen, and Yu-Jen Hsia, Micro-electromechanical System Gas SensorsBased on CeO2 Nanoparticles, Sens. Mater., Vol. 35, No. 3, 2023, p. 1141-1148.



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