pp. 1141-1148
S&M3235 Research Paper of Special Issue https://doi.org/10.18494/SAM4239 Published: March 31, 2023 Micro-electromechanical System Gas SensorsBased on CeO2 Nanoparticles [PDF] Tang-Yu Lai, Guan-Cheng Chen, and Yu-Jen Hsia (Received October 23, 2022; Accepted February 8, 2023) Keywords: cerium oxide, MEMS gas sensor, hydrogen
In this study, X-ray diffraction (XRD) analysis was used to show that cerium oxide (CeO2) nanoparticles have a face-centered cubic structure. CeO2 thin films on micro-electromechanical system (MEMS) gas sensors, which are used to test their sensitivity to hydrogen (H2), were prepared by dip coating. The test power of 116 mW (~300 ℃) is the power consumption of different gas concentrations. Different gases such as NH3, CO, and NO2 were also tested and compared. The results showed that CeO2 has a higher response at 50 ppm than at other concentrations. The structure of the CeO2 material and its reaction mechanism with H2 were examined and discussed.
Corresponding author: Tang-Yu LaiThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Tang-Yu Lai, Guan-Cheng Chen, and Yu-Jen Hsia, Micro-electromechanical System Gas SensorsBased on CeO2 Nanoparticles, Sens. Mater., Vol. 35, No. 3, 2023, p. 1141-1148. |