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Sensors and Materials
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Sensors and Materials, Volume 36, Number 3(4) (2024)
Copyright(C) MYU K.K.
pp. 1115-1125
S&M3585 Research Paper of Special Issue
Published: March 29, 2024

Development of Physical Vapor Deposition Technique and Testing on Ceramics and CoCrMo Alloys [PDF]

Feng-Min Lai and Tan-Chih Chang

(Received July 14, 2023; Accepted February 15, 2024)

Keywords: HiPIMS, TiN, CoCrMo alloy, X-ray, smoother surface, hardness

In this study, TiN thin films were coated on CoCrMo alloys and ceramic samples using vacuum coating technology with high-power impulse magnetron sputtering (HiPIMS), which was followed by coating at 100 and 200 °C to a thickness of 250, 500 or 750 nm to enhance the characteristics of the coated alloys. Through X-ray diffraction measurements, scanning electron microscopy, and microscale hardness testing, the structural, morphological, and mechanical characteristics of the CoCrMo and ceramic samples coated with TiN films were investigated in detail. The experimental results revealed that a smooth surface can be achieved on the film of 250 nm thickness and indicated that the TiN film with the smoother surface, formed by the vacuum coating method, has a higher hardness. It was also found that the TiN film prepared by coating at 200 °C had the smoothest surface and the highest hardness (365.64 HV0.5), leading to enhanced mechanical properties of the CoCrMo alloys. In the ceramic samples, the TiN film prepared by coating at 100 °C had the smoothest surface and the highest hardness (376.81 HV0.5). In addition, the vacuum coating process is helpful for improving the mechanical properties of TiN coating. The TiN materials are used in many sensor applications, and sensor applications can be realized using TiN/CoCrMo materials. In the future, we will study the sensing performance of TiN sensors fabricated on CoCrMo alloys, as well as implants made using the coated alloys. Then, we will further study circuit substrates, heat-resistant sensors, and corrosion- and wear-resistant parts that can be applied with TiN/Al2O3 materials.

Corresponding author: Feng-Min Lai

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Cite this article
Feng-Min Lai and Tan-Chih Chang, Development of Physical Vapor Deposition Technique and Testing on Ceramics and CoCrMo Alloys, Sens. Mater., Vol. 36, No. 3, 2024, p. 1115-1125.

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