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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Sensors and Materials, Volume 20, Number 1 (2008)
Copyright(C) MYU K.K.
pp. 15-34
S&M702 Research Paper
https://doi.org/10.18494/SAM.2008.481
Published: February 29, 2008

Atomic-Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization [PDF]

Lingli Liu, Osama M. Mukdadi, Marie K. Tripp, Cari F. Herrmann, Jean R. Hertzberg, Steven M. George, Victor M. Bright and Robin Shandas

(Received March 17, 2007; Accepted September 13, 2007)

Keywords: capacitive micromachined ultrasonic transducers, medical imaging, atomic-layer deposition

he production of ultrathin membranes facilitates the development of miniature capacitive micromachined ultrasonic transducers (CMUTs), which have potential for use in biomedical imaging applications. Here, we introduce a novel process, incorporating atomic-layer deposition (ALD) and diffusion bonding, for the fabrication of CMUTs with ultrathin membranes. In our fabrication procedure, first a 100 nm Al2O3 layer is deposited on an upper silicon wafer by ALD. A 500 nm gold layer is then deposited on the Al2O3 layer and patterned to create circular cavities. Then the whole structure is transferred to a bottom wafer by diffusion bonding and the upper silicon wafer is etched away to release the Al2O3 membrane. Finally, another 30 nm gold layer is deposited on the membrane for wiring and membrane excitation. Initial results show that extremely flat and uniform membranes can be produced using this process with a RMS roughness of less than 3 Å. The ALD technique also provides more options for membrane material selection and has the potential to improve transducer reliability. In this study, the ALD-fabricated CMUT array is characterized using numerical models. PACS: 43.38.Bs, 43.40.Dx

Corresponding author: Robin Shandas


Cite this article
Lingli Liu, Osama M. Mukdadi, Marie K. Tripp, Cari F. Herrmann, Jean R. Hertzberg, Steven M. George, Victor M. Bright and Robin Shandas, Atomic-Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization, Sens. Mater., Vol. 20, No. 1, 2008, p. 15-34.



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