Young Researcher Paper Award 2023
🥇Winners
🥇Winners
Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Tweets by Journal_SandM
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 36, Number 4(1) (2024)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1319-1328
S&M3600 Research Paper https://doi.org/10.18494/SAM4829 Published: April 9, 2024 Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma [PDF] Mina Sato, Mie Tohnishi, and Akihiro Matsutani (Received December 22, 2023; Accepted February 2, 2024) Keywords: Si, KOH, ion beam, amorphous, microfabrication
We demonstrated KOH etching with an etching mask amorphized by ion irradiation. Amorphized masks were prepared by irradiating ion species (Ar+, Kr+, Xe+, N+, O+) at an ion energy of 500 eV with an electron cyclotron resonance ion shower system. The parameters for KOH etching were also studied. In addition, we fabricated structures with an aspect ratio of over 3000 and microfluidic devices using the proposed microfabrication technique. This technique is expected to be useful for the microfabrication of Si structures.
Corresponding author: Mina Sato  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Mina Sato, Mie Tohnishi, and Akihiro Matsutani, Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma, Sens. Mater., Vol. 36, No. 4, 2024, p. 1319-1328. |
Forthcoming Regular Issues
Forthcoming Special Issues
Special Issue on Applications of Novel Sensors and Related Technologies for Internet of Things
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper
Special Issue on Advanced Sensing Technologies for Green Energy
Guest editor, Yong Zhu (Griffith University)
Call for paper
Special Issue on Room-temperature-operation Solid-state Radiation Detectors
Guest editor, Toru Aoki (Shizuoka University)
Call for paper
Special Issue on International Conference on Biosensors, Bioelectronics, Biomedical Devices, BioMEMS/NEMS and Applications 2023 (Bio4Apps 2023)
Guest editor, Dzung Viet Dao (Griffith University) and Cong Thanh Nguyen (Griffith University)
Conference website
Call for paper
Special Issue on Advanced Sensing Technologies and Their Applications in Human/Animal Activity Recognition and Behavior Understanding
Guest editor, Kaori Fujinami (Tokyo University of Agriculture and Technology)
Call for paper
Special Issue on Signal Collection, Processing, and System Integration in Automation Applications
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)
Call for paper
-
For more information of Special Issues (click here)
-
Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2024)
- Accepted papers (click here)
- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Hirotaka Takizawa, Masatoshi Minamisawa, Hirohiko Motoki, Koichiro Kuwahara, and Masaki Yamaguchi
- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Guest editor, Sheng-Joue Young (National United University)
Conference website
Call for paper
Special Issue on Asia-Pacific Conference of Transducers and Micro-Nano Technology 2024 (APCOT 2024)
Guest editor, Guangya ZHOU (National University of Singapore) and Chengkuo LEE (National University of Singapore)
Conference website
Call for paper
Special Issue on Sensing and Information and Communication Technologies toward Non-intrusive, Undisturbed, and Calm Healthcare Monitoring
Guest editor, Kosuke Motoi (Shizuoka Institute of Science and Technology)
Call for paper
Special Issue on Redefining Perception: Applications of Artificial-intelligence-driven Sensor Systems
Guest editor, Pitikhate Sooraksa (King Mongkut’s Institute of Technology Ladkrabang)
Call for paper
Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2024)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Mu-Chun Wang (Minghsin University of Science and Technology), Shih-Hung Lin (Chung Shan Medical University), Ja-Hao Chen (Feng Chia University)
Conference website
Call for paper
Special Issue on Spatial Information and Digital Twins for Built Environment Development
Guest editor, Jae Kang Lee (Dong-A University), Dong Ha Lee (Kangwon National University), Myeong Hun Jeong (Chosun University), Ji- Soo Park (Indiana State University), and Sung-Jin Kim (Hanbat National University)
Call for paper
Special Issue on Sensing and Data Analysis Technologies for Living Environment, Health Care, Production Management, and Engineering/Science Education Applications (2024)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Rey-Chue Hwang (I-Shou University), Ja-Hao Chen (Feng Chia University), Ba-Son Nguyen (Lac Hong University)
Call for paper
Special Issue on 2D Materials-based Sensors and MEMS/NEMS
Guest editor, Kazuhiro Takahashi (Toyohashi University of Technology)
Call for paper
Special Issue on Geomatics Technologies for the Realization of Smart Cities
Guest editor, Prof. He Huang (Beijing University of Civil Engineering and Architecture) and Prof. Junxing Yang (Beijing University of Civil Engineering and Architecture)
Call for paper
Special Issue on Smart Sensors for Chemical and Agriculture Applications
Guest editor, Kazuaki Sawada (Toyohashi University of Technology)
Call for paper
Special Issue on Advanced Sensor Materials, Processes, and Applications
Guest editor, Shih-Chen Shi (National Cheng Kung University) and Tao-Hsing Chen (National Kaohsiung University of Science and Technology)
Call for paper
Special Issue on Advances in Sensors and Computational Intelligence for Industrial Applications
Guest editor, Chih-Hsien Hsia (National Ilan University)
Call for paper
- Accepted papers (click here)
Copyright(C) MYU K.K. All Rights Reserved.