Young Researcher Paper Award 2023
🥇Winners

Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語

Template
English

Publisher
 MYU K.K.
 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.


MYU Research

(proofreading and recording)


MYU K.K.
(translation service)


The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 36, Number 8(3) (2024)
Copyright(C) MYU K.K.
pp. 3395-3405
S&M3739 Research Paper of Special Issue
https://doi.org/10.18494/SAM5096
Published: August 16, 2024

Temperature Dependence of Electrostatic Frequency Tunability of Ultrathin Si Nanoresonators [PDF]

Wei Yu, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya

(Received April 30, 2024 ; Accepted July 8, 2024)

Keywords: NEMS resonators, resonance frequency, electrostatic tuning, temperature coefficient of frequency

Nanoresonators are crucial elements of various nano-electromechanical systems for the development of ultrasensitive sensing, efficient signal processing, biological detection, and so forth. Implementing methods that facilitate the wide tuning of the resonance frequency is beneficial for many of these applications. Ultrathin Si nanoresonators (width ~10 nm, length ~100 µm) can exhibit a wide electrostatic tunability of resonance frequency, which can be used for the easy electrostatic compensation of the thermal drift in resonance frequency among many other potential applications. How this tunability is impacted by temperature variation is a pertinent issue in many potential applications of tunable Si nanoresonators but currently remains unknown. In this study, we experimentally investigate the temperature dependence of the electrostatic tuning of a Si nanoresonator of ~80 nm width and ~200 µm length across a temperature range of 100–300 K. The results show significant decreases in electrostatic tuning range, efficiency, and resonance frequency tendency with decreasing temperature. We provide an approximate thermo-electromechanical model to describe this behavior and discuss how a dual tuning strategy by gate voltage and temperature can potentially bring further opportunities in terms of on-the-spot adjustment of the nanoresonator’s frequency as demanded in specific applications.

Corresponding author: Amit Banerjee


Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Wei Yu, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya, Temperature Dependence of Electrostatic Frequency Tunability of Ultrathin Si Nanoresonators, Sens. Mater., Vol. 36, No. 8, 2024, p. 3395-3405.



Forthcoming Regular Issues


Forthcoming Special Issues

Special Issue on Applications of Novel Sensors and Related Technologies for Internet of Things
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper


Special Issue on Advanced Sensing Technologies for Green Energy
Guest editor, Yong Zhu (Griffith University)
Call for paper


Special Issue on Room-temperature-operation Solid-state Radiation Detectors
Guest editor, Toru Aoki (Shizuoka University)
Call for paper


Special Issue on International Conference on Biosensors, Bioelectronics, Biomedical Devices, BioMEMS/NEMS and Applications 2023 (Bio4Apps 2023)
Guest editor, Dzung Viet Dao (Griffith University) and Cong Thanh Nguyen (Griffith University)
Conference website
Call for paper


Special Issue on Advanced Sensing Technologies and Their Applications in Human/Animal Activity Recognition and Behavior Understanding
Guest editor, Kaori Fujinami (Tokyo University of Agriculture and Technology)
Call for paper


Special Issue on Signal Collection, Processing, and System Integration in Automation Applications
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)
Call for paper


Copyright(C) MYU K.K. All Rights Reserved.