pp. 103-110
S&M708 Research Paper https://doi.org/10.18494/SAM.2008.516 Published: May 29, 2008 Detection of Hydrogen Fluoride Gas Using Piezoresistive Microcantilever Sensors [PDF] T. L. Porter, T. Vail, R. Stewart and J. Reed (Received October 4, 2007; Accepted January 11, 2008) Keywords: keratin, hydrogen fluoride, microcantilever
We have used embedded piezoresistive microcantilever (EPM) sensors for the detection of hydrogen fluoride (HF) gas. These sensors have a keratin-based compound as the primary sensing material. Exposures to HF at high levels (beginning at 0 ppm and leveling off at 2300 ppm) resulted in nearly immediate response. Low-level exposures beginning at 0 ppm and leveling off at 230 ppm required 15 s for a measurable sensor response.
Corresponding author: T. L. PorterCite this article T. L. Porter, T. Vail, R. Stewart and J. Reed, Detection of Hydrogen Fluoride Gas Using Piezoresistive Microcantilever Sensors, Sens. Mater., Vol. 20, No. 2, 2008, p. 103-110. |