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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 36, Number 12(1) (2024)
Copyright(C) MYU K.K.
pp. 5117-5128
S&M3856 Research Paper of Special Issue
https://doi.org/10.18494/SAM5239
Published: December 3, 2024

Wireless Power Transmission by MEMS Vibration Energy Harvester Using Electromagnetic Torque [PDF]

Akihiro Nomura, Kensuke Kanda, Takayuki Fujita, Tsubasa Kuroki, and Kazusuke Maenaka

(Received July 17, 2024; Accepted August 29, 2024)

Keywords: wireless power transmission, MEMS, vibration, energy harvester, electromagnetic torque

We propose a wireless power transfer system using low-frequency magnetic fields. Low-frequency magnetic fields have less effect on the human body and less shielding effect by conductors than high-frequency magnetic fields such as the Qi standard. Therefore, we can explore areas of application in which current high-frequency magnetic field systems cannot be used. The power source is assumed to be a single coil or a Helmholtz coil driven by low-frequency AC current. The power-receiving device has a vibrating beam, which has a Pb(Zr,Ti)O3 (PZT) layer on the surface, and driving magnets. By applying an AC magnetic field, the beam is vibrated similarly to a tuning fork. The driven force is induced as a torque, and the device can operate even in a parallel magnetic field. The device is realized with MEMS technology and has a volume of 20 × 30 × 0.08 mm3, a PZT thickness of 10 µm, and a permanent magnet of 9 × 2 × 2 mm3 attached to it. The device has an output voltage of 3.24 Vrms and an output power of 1.54 mW at an applied magnetic flux density of 0.495 mT.

Corresponding author: Akihiro Nomura


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Cite this article
Akihiro Nomura, Kensuke Kanda, Takayuki Fujita, Tsubasa Kuroki, and Kazusuke Maenaka , Wireless Power Transmission by MEMS Vibration Energy Harvester Using Electromagnetic Torque, Sens. Mater., Vol. 36, No. 12, 2024, p. 5117-5128.



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