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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 37, Number 6(3) (2025)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2501-2506
S&M4069 Research Paper of Special Issue https://doi.org/10.18494/SAM5559 Published: June 25, 2025 Microstructure and Electrical Characteristics of NbMoTaW Thin Films [PDF] Cheng-Hsing Hsu, Yu-Hao Hsu, and Chuan-Feng Shih (Received January 5, 2025; Accepted May 19, 2025) Keywords: high-entropy alloy, RF magnetron sputtering, electrical properties
We investigated the electrical properties and microstructures of high-entropy alloy NbMoTaW thin films prepared by radio frequency (RF) magnetron sputtering at different RF powers and substrate temperatures. Diffraction patterns indicated that the deposited films had a polycrystalline microstructure, and scanning electron microscopy results revealed that grain size was dependent on RF power and substrate temperature. The effects of processing parameters on the microstructure and electrical characteristics of the films were also investigated. The NbMoTaW alloy films are suitable for use as an electrode in sensors.
Corresponding author: Cheng-Hsing Hsu  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Cheng-Hsing Hsu, Yu-Hao Hsu, and Chuan-Feng Shih, Microstructure and Electrical Characteristics of NbMoTaW Thin Films, Sens. Mater., Vol. 37, No. 6, 2025, p. 2501-2506. |
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